Alternative Masks for Nanolithography
نویسندگان
چکیده
منابع مشابه
Alternative Masks for Nanolithography
The use of masks coming from research field as different as colloids, polymers or nanomaterials is a recently emerging field. Recent advances in this area have developed a variety of practical routes which have a great potential to overcome or at least complete the high-cost lithographic techniques. This review focuses on three techniques that try to reduce to the nanometer range, the size of t...
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ژورنال
عنوان ژورنال: The Open Physical Chemistry Journal
سال: 2007
ISSN: 1874-0677
DOI: 10.2174/187406770701011007